Technological innovations throughout the past several decades have transformed the pharmaceutical manufacturing process from traditional batch production to ...

Even after 20 years or so, process control continues to be a confusing or misunderstood technology. A short description of process control is an accurate one—It’s a means of controlling manufacturing ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...